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LIFT-OFF: 作品数：50被引量：70H指数：5; 导出分析报告; 相关领域：电子电信更多>>; 相关作者：徐大朋何大伟程新红李元山俞跃辉更多>>; 相关机构：深圳大学上海芯钛信息科技有限公司安徽光智科技有限公司国防科学技术大学更多>>; 相关期刊：更多>>; 相关基金：国家自然科学基金国家重点基础研究发展计划北京市自然科学基金广东省自然科学基金更多>>

基于lift-off工艺的RF MEMS开关触点平坦化方法: 《微纳电子技术》2025年第2期116-121,共6页杨彪诸葛明华吴国才容炎森; 国家自然科学基金青年基金(62105082);广东省基础与应用研究基金(2023A1515011257);深圳市科技计划资助项目(20231129092735001)。; 采用表面微加工工艺制备射频微机电系统(RF MEMS)开关,开关触点的平坦化是一项关键工艺,直接影响RF MEMS开关的机械和电学性能。设计静电驱动接触式的RF MEMS开关结构,然后通过在触点上进行套刻制备光刻胶岛、蒸镀制备铝牺牲层,利用lift...; 关键词：射频微机电系统(RF MEMS)开关开关触点牺牲层平坦化 lift-off工艺

Reducing aerodynamic vibration of rigid rotors with retreating side active control avoidance: 《Chinese Journal of Aeronautics》2025年第1期353-364,共12页Weiliang LYU; supported by the National Natural Science Foundation of China(No.12372229);the Aeronautical Science Foundation of China(No.2020Z006063001);the Science and Technology on Rotorcraft Aeromechanics Laboratory Foundation,China(No.61422202110);the Fundamental Research Funds for the Central Universities of China(No.DUT22LK12)。; This paper proposes a new approach to eliminate aerodynamic lift oscillation,called the Dominant Sector Individual Blade Control(DS-IBC)method for rigid rotor helicopters.An Advancing Blade Concept(ABC)rotor model for...; 关键词：Advancing blade concept Lift-offset Rigid rotor Aerodynamic lift oscillation Dominant Sector Individual Blade Control(DS-IBC)

The lift-off effect analysis of flexible differential pick-up koch fractal eddy current probe: 《Journal of Measurement Science and Instrumentation》2024年第4期432-444,共13页CHEN Guolong FAN Le ZHANG Shuaishuai HAN Yu LI Yixin ZHANG Yanlong; supported by the National Nature Science Foundation of China(Nos.62471206,52467002)。; This study utilized finite element simulation and experimental methods to investigate the evolution of crack detection performanceof a flexible differential fractal Koch eddy current probe at different excitation freq...; 关键词：eddy current testing lift-off effect nondestructive testing crack detection fractal geometry

Theoretical and experimental research on static stiffness,performance,and lift-off characteristics of multi-layer gas foil thrust bearings: 《Friction》2024年第11期2458-2479,共22页Yang HU Pengjing DING Fangling WU Xiaojing WANG Bo LIANG Yonggang MENG; supported by the National Natural Science Foundation of China(Nos.52275204,51905298,and 52075311);the Shanghai Key Laboratory of Intelligent Manufacturing and Robotics.; In this study,a new comprehensive fully coupled elastic–hydrodynamic model is developed for a multi-layer gas foil thrust bearing(GFTB).The interaction effects among the top foil,back board,middle foil,and bottom foi...; 关键词：MULTI-LAYER gas foil thrust bearing(GFTB) load carrying mechanism static performance

Flexible bidirectional self-powered photodetector with significantly reduced volume and accelerated response speed based on hydrogel and lift-off GaN-based nanowires: 《Fundamental Research》2024年第2期369-378,共10页Min Jiang Yukun Zhao Penghui Zheng Jianya Zhang Wenxian Yang Min Zhou Yuanyuan Wu Renjun Pei Shulong Lu; National Natural Science Foundation of China(62174172,61875224 and 61827823);Key Research and Development Program of Jiangsu Province(BE2018005);Key Research Program of Frontier Sciences,CAS(ZDBS-LY-JSC034);support from Natural Science Foundation of Jiangxi Province(20192BBEL50033);Research Program of Scientific Instrument and Equipment of CAS(YJKYYQ20200073);SINANO(Y8AAQ21001);support from Vacuum Interconnected Nanotech Workstation(Nano-X,F2201),Platform for Characterization&Test of SINANO,CAS.; Due to the wide range of potential applications for next-generation multi-functional devices,the flexible selfpowered photodetector(PD)with polarity-switchable behavior is essential but very challenging to be realized...; 关键词：Flexible photodetector Bidirectional photocurrent Lift-off GaN-based nanowires HYDROGEL Self-powered device

Twisted Integration of Complex Oxide Magnetoelectric Heterostructures via Water‑Etching and Transfer Process: 《Nano-Micro Letters》2024年第1期360-369,共10页Guannan Yang Guohua Dong Butong Zhang Xu Xu Yanan Zhao Zhongqiang Hu Ming Liu; supported by the National Key Research and Development Program of China (Grant No. 2021YFB3201800);Natural Science Foundation of China (Grant Nos. U22A2019, 91964109, 52372123);State Key Laboratory for Mechanical Behavior of Materials (No. 20222405);Innovation Capability Support Program of Shaanxi (Grant No. 2021TD-12);National 111 Project of China (B14040);support from the Instrumental Analysis Center of Xi’an Jiaotong University; Manipulating strain mode and degree that can be applied to epitaxial complex oxide thin films have been a cornerstone of strain engineering.In recent years,lift-off and transfer technology of the epitaxial oxide thin ...; 关键词：Magnetoelectric heterostructures Twist angle Epitaxial lift-off Magnetic anisotropy Ferromagnetic resonance

Bolstering functionality in multilayer and bilayer WS_(2) via focused laser micro-engraving被引量：1: 《Science China(Information Sciences)》2023年第6期90-97,共8页Si Min CHAN Eng Tuan POH Jin Feng LEONG Kuan Eng Johnson GOH Chorng Haur SOW; supported by Agency for Science,Technology and Research (A^(*)STAR) (Grant No.1527000016);support from Agency for Science,Technology and Research (Grant No.#21709);Singapore National Research Foundation (Grant No.CRP21-2018-0001)。; Laser thinning of multilayer transition metal dichalcogenide(TMD)crystals has long been explored for its potential to produce localized domains of optically functional monolayers.Despite the high spatial control and r...; 关键词：WS_(2)monolayer micro-patterning focused laser sonication lift-off

多晶金刚石薄膜日盲紫外探测器件的电极制备被引量：2: 《发光学报》2022年第12期1974-1982,共9页陈子依张伟亮荣曦明韩舜曾玉祥曹培江方明柳文军朱德亮吕有明; 国家自然科学基金(51872187,11774241,12074263,21805194);广东省自然科学基金(2021A1515012013);深圳市学科布局项目(JCYJ20180508163404043,JCYJ2018030507182248925)资助。; 通过在直流等离子体喷射化学气相沉积(DC-PJCVD)法生长的多晶金刚石薄膜上制备Au叉指电极,构建了金属-半导体-金属(MSM)结构的日盲紫外探测器件。研究了不同光刻工艺对制备的金刚石探测器件性能的影响。结果表明,lift-off光刻工艺所制...; 关键词：金刚石薄膜 lift-off光刻工艺 Ag电极日盲紫外探测器

Large-area photonic lift-off process for flexible thin-film transistors被引量：1: 《npj Flexible Electronics》2022年第1期115-124,共10页Adam M.Weidling Vikram STurkani Vahid Akhavan Kurt A.Schroder Sarah L.Swisher; supported by the National Science Foundation under Grant No.ECCS-1710008;supported by the National Science Foundation through the National Nano Coordinated Infrastructure Network (NNCI)under award number ECCS-1542202;support from NSF through the MRSEC award number DMR-2011401.; Fabricating flexible electronics on plastic is often limited by the poor dimensional stability of polymer substrates.To mitigate,glass carriers are used during fabrication,but removing the plastic substrate from a car...; 关键词：FILM PROCESS ABSORBER

高长宽比金属铝热偶条的制备被引量：1: 《电子测量技术》2022年第11期45-51,共7页白悦杭雷程梁庭关一浩宫明峰齐蕾; 中央引导地方科技发展资金项目(YDZX20201400001664);山西省重点研发计划项目(201903D121123)资助。; 金属铝因其与多晶硅具备良好的塞贝克系数差且成本低在红外热电堆中常用作热偶条,热偶条制备在MEMS工艺流程制备中至关重要,其结构形貌对热电堆性能有很大影响。为研究不同制备方法对铝热偶条的形貌及性能影响,本实验采用金属刻蚀工艺...; 关键词：高长宽比热偶条铝 LIFT-OFF 曝光

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