适用于微加工工艺的纳米多孔铜制备方法  

Preparation Process of Nanoporous Copper Compatible with the Micro-Fabrication Technique

作　　者：岳恒[1] 张丛春[1] 李建华 杨卓青[1] 汪红[1] 丁桂甫[1] 赵小林[1] 

机构地区：[1]上海交通大学微纳科学技术研究院微米/纳米加工技术重点实验室,上海200240 [2]淮海工业集团有限公司,山西长治046000

出　　处：《微纳电子技术》2014年第1期53-58,共6页Micronanoelectronic Technology

基　　金：国家级重点实验室基金资助项目(9140C790103120C79268);中国工程物理研究院超精密加工技术重点实验室开放基金资助项目(KF13001)

摘　　要：主要研究了一种适用于微加工工艺的纳米多孔铜（NPC）制备方法。采用酸性柠檬酸铜锌电镀体系制备出Cu68Zn32前驱合金，通过改变前驱合金在盐酸中去合金的时间可以对NPC的微观形貌及孔径分布进行有效控制。研究结果表明，在0．05mol／L的盐酸中腐蚀6h后制备的NPC孔径为80～120nm，而系带尺寸为20～40nm，利用BET法测得其比表面积为8．12m2／g。另外，应用微加工工艺制备出边长为50μm方形微阵列，验证了该NPC制备工艺与微加工工艺有较好的兼容性，为NPC的图形化与集成制造提供一种有效的工艺方案。The preparation method of the nanoporous copper （NPC） was mainly studied. The method is compatible with the micro-fabrication technique. The Cu68Zn32 precursor alloy was prepared by electro-plating in citric acid bath solution containing copper ions and zinc ions. The NPC rnicrostructure and pore size distribution can be controlled effectively by changing the dealloying time of the precursor alloy in HC1 solution. The results show that after corrosion in 0.05 mol/L HC1 for 6 h, the prepared NPC pore size is 80- 120 nm, ligament dimension is 20- 40 nm, and its specific surface area measured by BET is 8.12 m2/g. In addition, the square microarray with side length of 50μm was fabricated by micro-fabrication technique, proving that the NPC preparation method is compatible with the micro-fabrication technique, and provides an effective process scheme for the NPC graphics and integrated manufacturing.

关 键 词：电沉积 前驱合金 纳米多孔铜(NPC) 去合金 微加工工艺 

分 类 号：TH703[机械工程—仪器科学与技术]