DLC,TiN薄膜的环境摩擦学特性研究  

Study on Tribological Properties of DLC and TiN Films Under Different Tribological Conditions

作　　者：祝闻[1] 聂朝胤[1] 冉春华[1] 金义栋[1] 赵洋[1] 

机构地区：[1]西南大学材料科学与工程学院,重庆400715

出　　处：《西南大学学报（自然科学版）》2014年第1期84-90,共7页Journal of Southwest University(Natural Science Edition)

基　　金：国家自然科学基金资助项目(NSFC.51271153)

摘　　要：采用非平衡磁控溅射及电弧离子镀技术在304奥氏体不锈钢表面沉积了类金刚石(DLC)及TiN薄膜.用纳米压痕仪、表面粗糙度仪、扫描电镜等检测了薄膜的显微硬度、表面粗糙度及表面形貌.并用球—盘式摩擦磨损试验仪评价了不同介质(干摩擦、水润滑、油润滑)条件下薄膜的摩擦磨损性能.结果表明:在干摩擦及水润滑条件下,TiN,DLC两种薄膜均明显改善了基体的耐磨性和润滑性,DLC薄膜性能更佳.但相对于干摩擦,在水润滑条件下,DLC薄膜的摩擦系数反而有所升高,这主要源于H2O与O2在摩擦过程中参与反应,降低了薄膜的力学性能和化学惰性从而增加了粘着效应.在油润滑条件下,DLC,TiN薄膜与基体摩擦系数相近甚至略高,薄膜的沉积虽然有利于基体耐磨性能的提高,但并不能改善基体的润滑特性.Diamond-like carbon （DLC） and tin thin （TIN） films were deposited on the 304 austenitic stain less steel substrates by using unbalanced magnetron sputtering and arc ion plating techniques, respective ly. The micro-hardness, surface roughness and morphology of the films and stainless steels were measured with a nano-hardness tester, a surface profiler and a scanning electron microscope （SEM）. The friction and wear properties of the DLC and the TiN films were evaluated with a ball-on disk trobometer under dif ferent testing conditions, including dry-state, water lubricating and oil lubricating. The results showed that the wear resistance and lubrication of the substrates with deposited TiN and DLC films were obviously improved under the dry friction and water lubrication conditions and the performance of DLC was better than that of TiN. Compared with dry friction, the friction coefficient of DLC film increased under water lubrication. This was mainly because Hz 0 and 02 participated in the reaction in the frictional process and decreased the mechanical properties and chemical inertness of the film, thus increasing the adhesive effect of DLC film. Under oil lubrication, the friction coefficients of DLC and TiN films and the substrate were similar. Although the deposition of films was beneficial to the improvement of wear resistance, it could not improve the lubrication performance of the substrate

关 键 词：非平衡磁控溅射 电弧离子镀 DLC薄膜 TIN薄膜 摩擦学特性 

分 类 号：O484.4[理学—固体物理]