微机械加工硅电容式加速度传感器  

A silicon capacitive acceleration sensor made in micromachining technology

作　　者：李跃进[1] 杨银堂[1] 朱作云[1] 马晓华[2] 陈锦杜[2] 

机构地区：[1]西安电子科技大学微电子研究所,陕西西安710071 [2]中国航天科技集团公司16所,陕西西安710100

出　　处：《传感器技术》2001年第1期57-59,共3页Journal of Transducer Technology

摘　　要：介绍了硅电容式加速度传感器的工作原理和制作过程。传感器的敏感元件为一个差分电容器 ,它是由活动质量块与两个玻璃极板通过阳极键合形成。活动质量块用标准的双极工艺和各向异性腐蚀工艺制作。该传感器的量程为 2 0 gn,线性度为 10 -4The fundamental principle and fabricating process of a silicon capacitive accelerometer are described. The sensing element consists of a differential capacitor which is formed by a movable mass and two electrodes situated on anodically bonded glass plates. The application of a standard bipolar process allows the movable mass to be realized by anisotropic wet etching.The non-linearity of 10 -4 magnitude is reached under a range of 20*#g n .

关 键 词：加速度传感器 差分电容器 各向异性腐蚀 微机械加工 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]