不锈钢基板化学机械抛光过程温度研究  

Research on process temperature during chemical mechanical polishing of stainless steel substrate

作　　者：郑海凤[1] 魏昕[1] 谢小柱[1] 杨向东[1] 胡伟[1] 

机构地区：[1]广东工业大学机电工程学院,广州510006

出　　处：《金刚石与磨料磨具工程》2014年第2期20-24,共5页Diamond & Abrasives Engineering

基　　金：国家自然科学基金项目(No.51175092);教育部高校博士学科专项科研基金项目(No.20104420110002);广东省自然科学基金项目(No 10151009001000036)资助

摘　　要：鉴于不锈钢化学机械抛光的复杂环境,研究了其抛光过程中温度的变化规律。设计并搭建了过程温度在线检测系统,检测并研究了不同工艺参数与温度之间的关系。实验结果表明:抛光温度随着抛光压力和抛光垫转速的增大而增大,随着抛光液流量的增大而减小。不锈钢基板边缘点抛光温度高于中心点抛光温度,聚氨酯材料比合成革和磨砂革材料的温升更大。当抛光垫加沟槽时,温升将明显下降,且径向型与周向型沟槽温度变化相差不大,网格型沟槽温差变化最小。抛光垫沟槽间距增大,温升增大;沟槽宽度对温升影响较小。Based on complex environment and temperature variation tendency during chemical mechanical polishing of the stainless steel suhstrate, process temperature measurement system is designed and built. The relationship between temperature and polishing parameter are obtained by experiments. Results show that the temperature increases with the increase of polishing pressure and rotation speed of polishing pad, but decreases with the increase of polishing solution rate. The temperature near the edge of the surface is higher than that near the center. Temperature increase on polyurethane pad is larger than those on synthetic leather and nubuck leather,and temperature will fall significantly when there are grooves on the pad. However, there is no big difference between temperature increases of radical and circumferential grooves, while grid groove has the smallest temperature changes. Temperature increase becomes larger as the distance between grooves increases but the effect is relatively weak.

关 键 词：不锈钢基板 化学机械抛光 温度检测 

分 类 号：TG73[金属学及工艺—刀具与模具]