单片集成阵列式MEMS矢量水听器设计与仿真  

Design and simulation of array type MEMS vector hydrophone on a chip

作　　者：薛南[1,2] 张国军[1,2] 申辉[1] 王万军[1,2] 陈桂英[1] 许娇[1] 

机构地区：[1]中北大学电子测试技术重点实验室,山西太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《舰船科学技术》2014年第4期78-81,共4页Ship Science and Technology

基　　金：国家863计划资助项目(2011AA040404);国家自然科学基金资助项目(61127008/F040703)

摘　　要：针对当前对MEMS矢量水听器高可靠性、宽频带的迫切要求,设计了2×2单片集成阵列式MEMS矢量水听器。矢量水听器单片集成阵列化可以提高水听器一致性,大幅度降低水听器的制造成本。在理论分析的基础上,通过Ansys软件完成对阵列微敏感结构机械特性和频率特性的仿真,确定压阻惠斯通电桥的布置及连接方式。对于水听器的研究和应用有重要意义。Aiming at the urgent demand of higher reliability and wider frequency band of MEMS vector hydrophone, a kind of 2 × 2 array type MEMS vector hydrophone on a chip is designed, which can improve consistency of hydrophone and decrease the manufacturing cost. On the basis of theoretical analysis, this paper simulates the sensitive micro-structure＇ mechanical characteristic and frequency characteristic by ANSYS. The arrangement of piezoresistive wheatstone bridge and its connection mode are confirmed. It is meaningful for the study on hydrophone and its applications.

关 键 词：MEMS技术 矢量水听器 ANSYS仿真 

分 类 号：TP565.1[自动化与计算机技术]