高性能音叉结构MEMS陀螺的抗冲击设计  

Shock Resistance Design of a High-Performance MEMS Tuning-Fork Gyroscope

作　　者：司朝伟[1,2,3] 韩国威[2,3] 宁瑾[2,3] 赵永梅[2,3] 杨富华[2] 

机构地区：[1]清华大学电子工程系,北京100086 [2]中国科学院半导体研究所,北京100083 [3]中国科学院传感技术国家重点实验室,北京100190

出　　处：《微纳电子技术》2014年第5期302-307,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61274001);北京市科技创新基地培育与发展工程专项(Z131103002813070)

摘　　要：MEMS音叉陀螺存在很多振动模态,分析发现,其在驱动方向上受到冲击时的振动形式与工作在驱动模态的振动形式是不同的。通过改进悬挂梁的尺寸结构,提高了冲击振动模态谐振频率以增强陀螺的抗冲击性,同时保持驱动模态谐振频率不超过20 kHz,保证了陀螺的性能。采用SOG工艺制备了所设计的MEMS音叉陀螺,经过测试,该陀螺驱动模态的品质因数为5 734,检测模态的品质因数超过了430 000,具备实现高精度角速度检测的能力。在重锤上对制备的陀螺进行了抗冲击测试,测试表明该陀螺在驱动方向上的抗冲击性能达到了23 000 g,能够满足惯性导航对器件的苛刻要求。The MEMS tuning-fork gyroscope has many vibration modes.The analysis shows that the vibration mode along the drive direction under the shock is different from the vibration mode operating in the driving mode.The resonant frequency of the shock vibration mode increases and the shock resistance of the gyroscope enhances by improving the size and structure of the suspension beam.The resonant frequency of the driving mode is kept below20 kHz to ensure the performance of the gyroscope.The designed MEMS tuning-fork gyroscope was fabricated by the SOG process.The test results show that the quality factor of the driving mode is 5 734 and the quality factor of the detection mode is over 430 000,showing the ability of the high precision angular rate detection.The shock resistance test of the gyroscope was carried out on the hammer. The test shows that the shock resistance reaches 23 000 galong the drive direction,satisfying the critical demands of the inertial navigation on the devices.

关 键 词：MEMS音叉陀螺 冲击模态 抗冲击性 高品质因数 惯性导航 

分 类 号：TH703[机械工程—仪器科学与技术]