各组分体积分数对碱性抛光液存储时间的影响  

Effects of Each Component Volume Fraction on the Storage Time of the Alkaline Slurry

作　　者：陈国栋[1] 刘玉岭[1] 蒋勐婷 刘伟娟[1] 袁浩博 

机构地区：[1]河北工业大学微电子研究所,天津300130

出　　处：《微纳电子技术》2014年第5期333-336,340,共5页Micronanoelectronic Technology

基　　金：国家中长期科技发展规划02科技重大专项资助项目(2009ZX02308)

摘　　要：主要研究了碱性抛光液各组分体积分数对其有效存储时间的影响。实验中每隔两个月测试了抛光液的pH值、平均粒径和Cu膜去除速率等参数随存储时间的变化值。研究表明:FA/O螯合剂体积分数是影响抛光液有效存储时间的主要因素,螯合剂体积分数越高抛光液的有效存储时间越短。在FA/O螯合剂体积分数较低时(8%),Cu布线碱性抛光液的有效存储时间在半年以上,基本能够符合产业化要求。SiO2磨料体积分数和非离子型表面活性剂体积分数是影响碱性抛光液有效存储时间的次要因素,对其有效存储时间影响不明显。The effects of each componentvolume fraction of the alkaline slurry on the effective storage time were mainly studied.The change values of the pH value,mean particle size and copper removal rate of the slurry with the storage time were tested every two months during the experiment.The results indicate that the volume fraction of the FA/O chelating agent is the major factor affecting the effective storage time.The volume fraction of the chelating agent is higher, the effective storage time of the slurry is shorter.The effective storage time of the copper wiring alkaline slurry is more than half a year when the volume fraction of FA/O chelating agent is lower（8%）,satisfying the requirement of the industrialization basically.The volume fractions of the SiO2abrasive and nonionic surfactant are secondary factors affecting the effective storage time of the alkaline slurry,there is no obvious effect on the effective storage time.

关 键 词：碱性抛光液 有效存储时间 稳定性 铜布线 化学机械平坦化(CMP) 

分 类 号：TN305.2[电子电信—物理电子学]