采用柔性铰链的快速反射镜设计  

Design of fast steering mirror using flexible hinge

作　　者：周子云[1,2] 高云国[1] 邵帅[1] 薛向尧[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100039

出　　处：《光学精密工程》2014年第6期1547-1554,共8页Optics and Precision Engineering

基　　金：中国科学院长春光学精密机械与物理研究所三期创新工程资助项目(No.057X22C050)

摘　　要：根据激光发射系统对快速反射镜发射方向精度的需求,提出了一种新型快速反射镜设计方案。该方案以柔性铰链为运动传递元件,采用直线音圈电机驱动,并用高精度光栅测微仪实现位置闭环控制。首先,介绍了反射镜工作原理及驱动方式,选择了系统的驱动元件和测角元件,并对柔性铰链结构进行设计。在研究其刚度特性的基础上,采用序列二次规划法优化了铰链关键尺寸。然后,建立了驱动组件的简化模型,并利用理论公式和有限元分析软件分别计算驱动组件的转角精度。最后,使用测角元件及自准直平行光管测量了快速反射镜的转角精度。实验结果表明:所设计的快速反射镜装置工作稳定、结构可靠,对发射光束的控制精度能达到0.95″,满足激光发射系统实时控制光束发射方向的精度要求。A new design scheme for fast steering mirrors was proposed according to the requirements of a laser launching system for emission accuracy. A flexible hinge was used in two-shaft fast steering mirror structure as the moving transmission device, a linear voice coil motor was as a driving component and a high precision optical grating micrometer was taken to implement the position closed control. The operational principle and drive mode of the fast steering mirror were introduced, and the drive components and an angle measuring device were selected. Then, the structure of the flexible hinge was designed. On the basis of researching the stiffness characteristics of the straight beam flexible hinge, sequential quadratic programming algorithm was used to optimize the critical dimensions of the hinge. Furthermore, a simplified model of the drive components was established, and theoretical models and finite element analysis software were used to calculate and verify the transmission accuracy of the drive assembly. Finally, angle measurement components and autocollimation were used in the measurement of the rotation accuracy of the fast steering mirror. The the mechanical str can reach to 0.95＇＇ tion in the laser la ueture , satisfying e fast steering mirror is stabl the precision requirements of unch system. e, reliable, experimental results show that and the beam control precision real-time control of the transmission direction in the laser launch system.

关 键 词：快速反射镜 音圈电机 柔性铰链 传动精度 

分 类 号：TN248[电子电信—物理电子学] TP273[自动化与计算机技术—检测技术与自动化装置]