激光直写系统焦斑整形的研究  

Focused spot shaping in laser writing system

作　　者：李凤友[1] 李红军[1] 卢振武[1] 廖江红[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130022

出　　处：《光学精密工程》2001年第1期14-18,共5页Optics and Precision Engineering

基　　金：应用光学国家重点实验室基金资助项目! (DA 0 0 Q0 5 D)

摘　　要：针对激光直写光刻系统设计整形衍射光学元件 ( DOE) ,对写入焦斑的整形进行了研究。提出对不同焦距写入物镜下的焦斑 ,利用同一个 DOE加以整形的方法。模拟表明 :整形后焦斑的面形和边缘显著改善 ,衍射效率高于实用指标 ,提供一种改善系统分辨能力的有效途径。The diffractive optical elements (DOE) with shaping the focused spot for laser writing system are designed , while discussing their performances for shaping laser writing spot. An efficient way of using a DOE to shape the laser writing spot under the objectives with various focal lengths is presented. The simulating results indicate that the spot-shaped sizes is only more twice than the diffraction limited spot sizes under this system, its diffraction efficiency is about 71.38% and the edges of the uniform area become dramatically sharper than the result without DOE.

关 键 词：激光直写 光束整形 衍射光学元件 DOE 光刻 

分 类 号：TN305.7[电子电信—物理电子学]