离子束刻蚀法制作菲涅耳透镜  

Fresnel lens fabricated by ion beam etching

作　　者：李红军[1] 卢振武[1] 廖江红[1] 翁志成[1] 王乃强 刘金声 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130022 [2]航天工业总公司23所,北京100018

出　　处：《微细加工技术》2001年第1期26-29,66,共5页Microfabrication Technology

摘　　要：由于衍射光学元件独特的色散特性及体积小、重量轻可进行复制等优点 ,它在国防、生产及科研等领域的作用越来越重要 ,应用于光学成像系统 ,不仅能改善系统成像质量 ,而且能实现系统的轻量化、小型化 ,增加系统设计的自由度。使用离子束刻蚀法制作的 1 6阶菲涅耳透镜应用于折衍混合CCD相机 ;测量菲涅耳透镜的衍射效率并分析了影响衍射效率的因素。As DOE have special dispersion,small volume,light weight and can be replicated, it plays more and more important role in national defence,production and science research.Its application in optical imaging system can not only improve imaging quality,but also perform system's lightweight,miniaturization and increase degree of freedom in the design.The 16?step Fresnel lens had been fabricated by ion beam etching and it has been used in refractive?diffractive CCD camera.Its diffractive efficiency is measured and the factors to affect it are analyzed.

关 键 词：衍射光学元件 离子束刻蚀 菲涅耳透镜 衍射效率 

分 类 号：TN16[电子电信—物理电子学] TN305.7