Analysis and Design for a Micro Mechanical Optical Switch  

一种微机械光开关的分析和设计(英文)

作　　者：贾玉斌[1] 陈良惠[1] 李玉璋[1] 

机构地区：[1]中国科学院半导体研究所国家光电子器件工程研究中心,北京100083

出　　处：《Journal of Semiconductors》2001年第7期837-840,共4页半导体学报（英文版）

摘　　要：The mechanical and electric characteristics of a cantilever beam micro opto mechanical switch are studied theoretically,with which the dependence of the flexion on the applied voltage is derived,as well as the formula of the threshold voltage.The applied voltage,having no connection with the width of the beam,is in inverse proportion to the square of the beam's length.The deflection at the beam's tip cannot exceed 1/3 of the distance between two adjacent electrodes.These results are the basis of the switch design and development.对悬臂梁微机械光开关的机电特性进行了理论分析 .利用机械和电学特性 ,导出了悬臂梁的弯曲量和所加的电压的解析关系 ,并给出了阈值电压的计算公式 .指出外加电压与梁的宽度无关 ,与梁的长度的平方成反比 .悬臂梁尖端的弯曲量不能超出相邻电极间距的 1/ 3.

关 键 词：MEMS optical switch cantilever beam threshold voltage 

分 类 号：TN256[电子电信—物理电子学]