基于微石英晶振的动态非接触静电力显微测量(EFM)技术  

Dynamic non-contact mode electrostatic force microscope (EFM) techniques based on tuning fork quartz

作　　者：王志勇[1] 鲍剑斌[1] 张鸿海[1] 郭文明[1] 

机构地区：[1]华中科技大学机械学院纳米技术实验室,武汉430074

出　　处：《电子显微学报》2001年第5期664-668,共5页Journal of Chinese Electron Microscopy Society

摘　　要：在一台基于微晶振的原子力显微镜的基础上 ,通过在针式传感器前端细小针尖加入可调交流偏压 ,获得高分辨率动态非接触静电力显微镜。此装置可以分别利用微小针尖与样品间的范德华力与附加的可调静电力信号 ,同时获得样品表面微观形貌特征和表面电特性 ,如表面电荷分布。By operating an ac modulation bias on the mini tip of the needle sensor, based on atomic force microscope using tuning fork, we have achieved a dynamic non contact mode EFM with high spatial resolution. It can utilize the Van Der Waals force and electrostatic force signals between micro tip and sample, respectively, to obtain the topography and the electric characters of semiconductor devices simultaneously. For example, the surface charges distribution and surface potentiality.

关 键 词：扫描探针显微镜 静电力显微镜 石英晶振 微力传感器 微观形貌 电特性 

分 类 号：TN16[电子电信—物理电子学]