CMOS器件总剂量效应长线传输在线测试系统  

A Long Cable Transmission On-Line Test System for CMOS Device in Total Dose Radiation

作　　者：关颖[1] 林东生[1] 郭红霞[1] 韩福斌[1] 吴国荣[1] 

机构地区：[1]西北核技术研究所,陕西西安710024

出　　处：《微电子学》2001年第5期367-369,共3页Microelectronics

摘　　要：主要介绍了长线在线测试系统在60 Co源辐射场中的应用。实验中 ,解决了辐射场低能散射对小电流测量带来的影响问题。在线测量减少了移位测量中的操作繁琐及退火效应带来的差异。该系统具有操作简单、测量方便。The application of long cable test system in the 60 Co γ ray radiation environment is presented in the paper. The experiment has been conducted on a 60 Co γ ray source. Effects of low energy scattering on the measurement of small signal current are investigated and solution to the problem is found out n the experiment. The on line test simplifies numerous operations in the off line test and reduces errors caused by annealing and operation.

关 键 词：CMOS器件 在线测量 总剂量辐射 低能散射 

分 类 号：TN386.1[电子电信—物理电子学] R144.1[医药卫生—公共卫生与预防医学]