光子热丝法沉积金刚石膜(英文)  

Deposition of diamond films by photo－hotfilament method

作　　者：彭鸿雁[1] 申家镜[1] 杨贵龙[1] 邵春雷[1] 魏雪峰[1] 杨广亮[2] 金曾孙[2] 

机构地区：[1]黑龙江省光电技术研究所,黑龙江157000 [2]吉林大学超硬材料国家重点实验室,吉林130023

出　　处：《功能材料与器件学报》2001年第3期311-313,共3页Journal of Functional Materials and Devices

摘　　要：采用一种改进的热丝 CVD系统沉积金刚石膜。在传统热丝 CVD腔中设置一套红外线发 生器，中心波长 3.5μ m,处于氢与甲烷分子拉伸振动吸收峰位置。由于共振吸收能量使反应气 体分解加强 ,在反应区获得较高浓度的原子氢和活性碳氢基团，使金刚石膜的生长速率和品质得到了提高。An improved hot－ filament CVD system was developed to deposit diamond films. An infrared generator in the hot－ filament CVD chamber was designed with the main wavelength 3.5μ m, which was right situated in the stretch vibration absorption peak of the C－ H bond in methane molecule and H－ H bond in hydrogen molecule. The decomposition of precursor gas is enhanced due to resonance absorption of energy, so high densities of hydrogen atom and active hydrocarbon cluster are obtained near the sub－ strate surface. Therefore, higher growth rate (13μ m/h) and high quality diamond film are achieved.

关 键 词：光子热丝 金刚石膜 生长速率 CVD 

分 类 号：TN304.18[电子电信—物理电子学] O484[理学—固体物理]