单轴柔性铰链设计方法研究  

Study on design method of one-axis flexure hinge

作　　者：李玉和[1] 李庆祥[1] 陈璐云[1] 白立芬[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《清华大学学报（自然科学版）》2002年第2期172-174,共3页Journal of Tsinghua University(Science and Technology)

基　　金：国家自然科学基金资助项目 ( 5 9875 0 5 2 )

摘　　要：针对微机电系统中常用单轴柔性铰链机构原始理论设计的复杂性 ,提出了简洁而准确的单轴柔性铰链设计计算方法。从基础理论出发推导出了柔性铰链刚度及转角设计公式 ,分析了柔性铰链设计中结构参数与性能的关系。通过一种压电驱动微动工作台设计实例分析了单轴柔性铰链机构在微机电系统中的应用。实践证明了该方法的简便。To avoid the complexity of the design in flexure hinge, one concise and accurate design method is presented for the one axis flexure hinge and a series of calculating equations of rotating rigidities of flexure hinge are deduced. Then the design method and the effect of the design parameters on the performance of one axis flexure hinge are discussed. In the end the application analysis of the one axis flexure hinge in a micro electro mechanical system (MEMS) is carried out through a design example of micro stage actuated by piezoelectric element, and the advantages of the method, time saving and high efficiency, are shown.

关 键 词：柔性铰链 微机电系统 计算机辅助设计 刚度 转角 机械传动 可逆弹性支撑结构 

分 类 号：TH132.45[机械工程—机械制造及自动化] TH122