热丝碳化促进CVD金刚石成核增强的物理机制  

Mechanism of diamond nucleation enhancement by filament carburization in HFCVD process

作　　者：邱东江[1] 吴惠桢[1] 石成儒[2] 徐晓玲[1] 郝天亮 

机构地区：[1]浙江大学物理系,浙江杭州310028 [2]浙江大学中心实验室,浙江杭州310028

出　　处：《功能材料》2002年第1期46-48,共3页Journal of Functional Materials

基　　金：浙江省自然科学基金资助项目(596030)

摘　　要：采用扫描电镜、Ｘ射线衍射及喇曼光谱等手段研究了ＨＦＣＶＤ过程中热丝碳化对金刚石成核特性的影响。热丝经充分碳化后能发射出更多热电子，进而从反应气体中激发出更多原子Ｈ和ＣＨ３＋，使金刚石晶核的孕育期大为缩短，３ｍｉｎ内即可在未经表面预处理的Ｓｉ衬底上获得１０１０ｃｍ－２以上的高晶核密度。The mechanism of diamond nucleation enhancement by filament carburization in the hot filament chemical vapor deposition (HFCVD) process was investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy. The deeply carburized filament can emit far more hot electrons, which is essential to enhance its decomposition efficiency to the reaction gas mixtures. As a result, the duration of diamond nuclei incubation can be significantly shortened, and the nuclei density of diamond as high as 1010cm-2 can be easily achieved within 3min.

关 键 词：热丝碳化 金刚石 成核 CVD 金刚石膜 

分 类 号：O484.1[理学—固体物理]