超净高纯试剂的现状、应用、制备及配套技术  

The actuality,application,preparation and assistant technologies of Ultra-clean and high pure chemical reagents

作　　者：穆启道[1] 

机构地区：[1]北京化学试剂研究所,北京100022

出　　处：《化学试剂》2002年第3期142-145,共4页Chemical Reagents

摘　　要：对国内外微电子技术配套专用超净高纯试剂进行了评述The actuality,application field,preparation technologies,related assistant technologies and future development trend of Ultra clean and high pure chemical reagents used in micro electronic industries are reviewed.

关 键 词：超净高纯试剂 应用 制备 湿法清洗 半导体 刻蚀 

分 类 号：TQ421.23[化学工程]