光刻机E-Pin升降机构的控制系统设计  

Design of Lithography E-Pin Hoist Control System

作　　者：徐加彦 陈兴林[1] 范文超[1] 张广莹[1] 

机构地区：[1]哈尔滨工业大学航天学院,哈尔滨150001

出　　处：《自动化与仪表》2014年第7期57-60,共4页Automation & Instrumentation

摘　　要：考虑到光刻机E-PIN升降机构吸附硅片做上下往复运动,准确定位、快速性、稳定性的要求,提出了一种基于DSP和FPGA的升降机构控制系统设计和实现方法。以TI公司的DSP2812为控制器,Altera公司的EP3C25E144C3N作为可编程逻辑器件,设计了信号采集模块,规划了控制系统的整体框架,定义了通信传输协议。详细介绍了控制系统的运动控制模块、传感器模块、驱动电路、音圈电机执行机构等方面的设计。通过实验证明,该控制系统运行可靠,准确性、稳定性达到要求。Considering the lithography E-PIN lifting mechanism adsorbing silicon doing up and down reciprocating motion,accurate positioning,speediness and stability requirements,this paper proposes the design and implementation method of a hoist control system based on DSP and FPGA. Using DSP2812 of TI company as the controller,Altera company EP3C25E144C3N as programmable logic devices,design signal acquisition hardware module,planning the overall framework of the control system,define the protocol of communication and transportation to the collected sig- nals. Introduced the control system of the motion control module,sensor module,drive circuit,the design of voice coil motor actuators,etc. Design of control system was proved by experiments and reliable operation,accuracy,stability, meet the requirements.

关 键 词：DSP2812 E-PIN升降机构 光刻机 音圈电机 

分 类 号：TP277[自动化与计算机技术—检测技术与自动化装置]