低阻尼MEMS加速度传感器频率特性快捷测试法  

Fast Frequency Characteristic Testing Method for the Low Damping MEMS Accelerometer Sensor

作　　者：张旭辉[1] 徐爱东[1] 卞玉民[1] 

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《微纳电子技术》2015年第2期108-112,共5页Micronanoelectronic Technology

摘　　要：提出了一种适合低阻尼MEMS压阻加速度传感器频率特性的测试方法,可较为快捷地获得传感器谐振频率和阻尼比等频率特性。首先介绍了该方法的理论依据和计算方法,然后介绍了典型测试系统构成和测试结果,并将该方法的测试结果与传统扫频测试方法的测试结果进行了对比,本方法所测得的传感器谐振频率和阻尼比分别为26.58 kHz和0.015,扫频测试方法所测得的传感器谐振频率和阻尼比分别为26.66 kHz和0.005。结果显示,该方法所得结果具有较好的精度,并具有操作简单、快速、重复性好及系统搭建成本低等优点。该方法已应用于汽车碰撞用MEMS压阻加速度传感器的生产,作为检测和筛选的测试手段。A novel frequency characteristic testing method especially suitable for low damping MEMS piezoresistive accelerometer sensor was presented.The resonant frequency,damping ratio and other frequency characteristics of the accelerometer sensor can be obtained with the method fast.Firstly,the theoretical basis and calculation method were presented,and then the typical composition of the testing system and the testing result were introduced.In succession,the comparison of the testing results obtained with the tradition method and the new method for the same accelerometer sensor was given.And the resonant frequency and the damping ratio were26.58 kHz and 0.015 respectively with the new testing method,while the resonancy frequency and the damping ratio were 26.66 kHz and0.005 respectively with the traditional vibration sweep testing method.The results show that the good and reasonable precision result can be obtained with the new method.Besides,the new method also has advantages such as simple operation,fast test,good repeatability and low cost for the testing system.The method is used in the production of the MEMS piezoresistive accelerometer sensors for crash applications as the process testing method for detection and screen.

关 键 词：微机电系统(MEMS) 压阻 加速度传感器 汽车碰撞 谐振频率 阻尼比 

分 类 号：TH703[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]