精磨光学元件面形的干涉检测技术研究  

Research on interferometric measurement technology for fine grinding optics surface

作　　者：代雷[1] 吴迪[2] 张健[1] 张春雷[1] 于长淞[1] 谷勇强[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室超精密光学工程研究中心,长春130033 [2]空军航空大学航空航天情报系,长春130022

出　　处：《电子测量与仪器学报》2015年第4期558-562,共5页Journal of Electronic Measurement and Instrumentation

基　　金：国家科技重大专项支持(2009ZX02205)项目

摘　　要：为解决传统接触式检测方法检测精磨光学元件效率低,精度差的问题,提出了一种采用干涉检测技术对精磨光学元件面形进行测量方法,该方法具有非接触,测量效率高,误差小的特点。干涉检测中干涉条纹的对比度与工作波长成正比,与表面粗糙度成反比,干涉条纹对比度直接影响最终的检测结果。因此首先分析干涉条纹对比度与精磨表面粗糙度之间的关系,证明采用可见光干涉仪对精磨粗糙表面进行检测的可行性,并对利用GPI型数字干涉仪检测精磨粗糙表面进行了实验验证,检测面形结果约为PV 1.5μm,并与红外干涉仪以及接触式轮廓仪测量结果进行了对比,验证结果有效性。最后给出了当粗糙度阈值Rq优于150 nm时,可采用该方法进行检测,具有较高的实用价值。In order to improve the disadvantage of classic contact measurement method of fine grinding optics , a method to measure fine grinding optics surface based on interferometry is proposed , which has the advantage of non-contact, high efficiency and less error.The contrast of interferometric fringe is positive related with the working wave-length and negative to surface roughness, furthermore, the contrast is significant effect to the final results of interfer-ometry.Therefor the relationship between fringe contrast and surface roughness is analyzed to prove the viability of the method base on visible laser source.The experiment is carried out, and the measurement result is about PV 1.5 μm by GPI.Comparing with the infrared interferometer and contact surface profiler, the effectively of the method is proved.Finally, the conclusion is that when roughness threshold Rq is below 150 nm, the fringe contrast can satis-fy the demands of this method.The technology can satisfy the requirements of non-contact, higher precision and rapid speed and provide positive effect with improving the measurement and fabrication of fine grinding optics .

关 键 词：精磨检测 光学元件 干涉检测 

分 类 号：TP96[自动化与计算机技术] TN29[电子电信—物理电子学]