退火升温速率对氧化铝涂层性能的影响研究  

Effects of Annealing Heating Rate on Properties of Aluminum Oxide Coating

作　　者：唐秀凤[1] 罗发[1] 周万城[1] 朱冬梅[1] 

机构地区：[1]西北工业大学凝固技术国家重点实验室,陕西西安710072

出　　处：《热加工工艺》2015年第8期161-163,共3页Hot Working Technology

摘　　要：采用直流反应磁控溅射的方法将1μm厚的氧化铝涂层沉积于K424镍基高温合金基底上。为了减少涂层缺陷,优化涂层性能,本文以不同的升温速率对制备得到的氧化铝涂层进行500℃保温1 h的退火处理,并通过XRD、SEM等研究了退火升温速率对氧化铝涂层微观结构,表面形貌以及显微硬度的影响。结果表明:经800℃保温1 h进一步的高温热处理之后,γ-Al_2O_3结晶首先在以25℃/min升温速率退火后的试样中发现,并且以25℃/min升温速率退火后的试样拥有最致密的表面形貌。lμm aluminum oxide coatings were deposited on K424 Ni superalloy substrates by direct current reactive magnetron sputtering. Annealing heating treatments were carried out on the as-deposited aluminum oxide coatings at 500 ℃ for lh in dependence of different annealing heating rates, in order to reduce the defects and optimize the properties of the coatings.Effects of the annealing heating rates on the microstructure, surface morphology and mierohardness of the aluminum oxide coatings were studied by XRD and SEM. The results show that distinct γ-Al2O3 crystallization is first observed in the case of 25 ℃/min, when these annealed samples are further heated at 800 ℃ for 1 h. Also, the 25 ℃/min-annealed sample possesses the most impact surface morphology

关 键 词：氧化铝涂层 直流反应磁控溅射 退火升温速率 表面处理 

分 类 号：TG156.2[金属学及工艺—热处理]