扫描轨迹下的分段迭代补偿策略  

Segmented Iterative Compensation Strategy under Scanning Track

作　　者：魏凯[1] 范文超[1] 陈兴林[1] 张广莹[1] 

机构地区：[1]哈尔滨工业大学航天学院,黑龙江哈尔滨150001

出　　处：《自动化仪表》2015年第5期19-22,共4页Process Automation Instrumentation

基　　金：国家重大科技专项基金资助项目(编号:2009ZX02207)

摘　　要：为提高光刻机掩模台系统的步进扫描品质,进而提高硅片成品质量,提出一种基于S曲线的轨迹规划。对迭代学习控制进行了研究,并针对普通全局迭代算法可能造成系统在特定环节恶化的局限性,采用分段迭代补偿策略,对迭代学习控制器进行分段优化。仿真表明,分段迭代学习控制满足系统的实际需求,可以应用在掩模台系统的调试中。To improve the quality of step scan of the reticle stage system of lithography, thus enhance the quality of the finished products of silicon wafers, the trajectory planning based on S-curve is proposed. The iterative learning control is studied, and in accordance with the limitations under specific part of the system becomes deterioration in the general global iteration algorithm, the iterative learning controller is optimized in segmentally by adopting segmented iterative compensation strategy. The simulation indicates that iterative learning control satisfies practical demands for the system ; it can be used in commissioning of the reticle stage system.

关 键 词：光刻机 掩模台 步进扫描 S曲线 分段迭代学习控制 

分 类 号：TP273.3[自动化与计算机技术—检测技术与自动化装置]