高精度位移传感器线性度标定方法研究  

Linearity calibration method of the high-precision displacement sensor

作　　者：张德福[1] 葛川[1] 李显凌[1] 倪明阳[1] 郭抗[1] 李朋志[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033

出　　处：《仪器仪表学报》2015年第5期982-988,共7页Chinese Journal of Scientific Instrument

基　　金：国家科技重大专项基金(2009ZX02205)项目资助

摘　　要：针对光学系统中光学元件的高精度位移调节和检测问题,提出一种非接触电容位移传感器的线性度标定方法,搭建了一个运动轴、测量轴和传感轴三轴共线的标定平台,从测量原理上消除阿贝误差。介绍了标定平台的组成和标定方法的原理,采用对称平行四边形机构实现微位移调节,基于柔度矩阵法分析了调节机构的输出柔度和行程。试验结果表明,机构的柔度为13.585μm/N,运动行程为543.4μm,分辨率约为10 nm。经过标定补偿计算,传感器的线性度由0.047 14%提高至0.004 84%。该线性度标定方法精度高,标定后的传感器满足精密位移调节机构使用要求。To address the issue of high-precision displacement adjustment and measurement in optical system,a linearity calibration method of non-contact capacitive displacement sensor is proposed. A calibration platform in which the movement axis,the measurement axis and the sensing axis are collinear is built. The Abbe error is eliminated in the measurement principle. The composition and principle of the calibration method are presented. Symmetrical parallelogram mechanism is used to achieve micro- displacement adjustment. The output compliance and travel stroke of the mechanism are analyzed based on the compliance matrix method（ CMM）. Results shows that the compliance of the mechanism is 13. 585μm / N,and its movement stroke and positioning resolution are 543. 4μm and 10 nm respectively. The linearity of the sensor is improved from 0. 047 14% to 0. 004 84% after calibration calculation. The linearity calibration method exhibits high-precision,which satisfies the requirement of fine adjustment mechanism of displacement.

关 键 词：传感器 标定 线性度 柔度矩阵 

分 类 号：TH74[机械工程—光学工程]