微悬臂梁结构的谐振式MEMS黏度传感器  

Resonant MEMS Viscosity Sensor of Micro Cantilever Beam Structure

作　　者：热合曼.艾比布力 胡英杰[2] 王同东[2] 赵立波[2] 赵玉龙[2] 蒋庄德[2] 

机构地区：[1]新疆交通职业技术学院汽车与机电工程学院,新疆乌鲁木齐831401 [2]西安交通大学机械制造系统工程国家重点实验室,陕西西安710049

出　　处：《仪表技术与传感器》2015年第5期8-10,27,共4页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(51375378;91323303);陕西省科学技术研究发展计划项目(2012KJXX-01);中央高校基本科研业务费专项资金资助项目(2012jdgz08);科技重大专项资助项目(2011ZX04004-061);国家重大科学仪器设备开发专项资助项目(2012YQ03026101);111引智计划资助项目(B12016)

摘　　要：文中研究了谐振方法测量流体黏度的测量机理,采用MEMS工艺设计并加工了微悬臂梁结构的流体黏度传感器芯片,芯片作为振动体采用电磁激励和压阻检测的方法进行粘度测量。设计了封装结构并搭建了实验系统,在室温环境20℃和25℃2个温度点下进行了4种有机流体的黏度测量。实验结果表明,微悬臂梁结构的谐振式MEMS黏度传感器具有响应速度快、微型化程度高、易于实现在线流体测量等特点,黏度的测量精度优于8%,较好地满足了流体黏度的工程测量需求。The mechanism of fluid viscosity measurement was studied using resonance method in this paper.Firstly,the fluid viscosity sensor chip with micro cantilever beam structure was designed and manufactured using MEMS （ Micro Electro Mechanical Systems） technology.The chip as vibration body was excited by electromagnetic force and tested by piezoresistive effect for the measurement of fluid viscosity.Then the encapsulation structure was designed.Also,the experimental system was set up to calibrate the sensor through testing 4 kinds of organic fluid viscosity under 20℃and 25℃at room environment.The experimental results show that the resonant MEMS viscosity sensor with micro cantilever beam structure has characteristics of quick response,high miniaturization,and in-situ measurement.The measuring accuracy of the sensor is better than 8%,and it can meet the measurement demand of fluid viscosity in the engineering.

关 键 词：MEMS 黏度 微悬臂梁 谐振 传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]