雪崩光电二极管芯片自动测试系统  

Establishment of Avalanche Photodiode Chip Auto Test System

作　　者：杨红伟[1] 张岩[1] 齐利芳[1] 尹顺政[1] 

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《半导体技术》2015年第6期473-477,共5页Semiconductor Technology

摘　　要：利用Keithley 2400源表、AV6381可编程光衰减器、AV 38124 1 550 nm单模半导体激光器和TZ-608B型光电屏蔽探针台搭建雪崩光电二极管芯片自动测试系统。在Labview环境下开发了自动测试软件,通过软件控制测量仪表,实现了雪崩光电二极管芯片的击穿电压、暗电流、穿通电压及10倍增益工作点电压的自动测试及合格判定。探针台可以根据测量系统反馈的判定结果对不合格芯片进行NG标记,方便划片后对不合格芯片进行筛选和剔除。建立的自动测试系统准确性高,测试速度快,软件操作方便,显示结果直观。同时可以实现测试参数的自动存储,方便进行统计过程控制(SPC)分析。Avalanche photodiode （APD） chip auto-test system was built up by using Keithley 2400 SMU, AV6381 programmable light attenuator, AV38124 1550 nm signal mode semiconductor laser and TZ-608 photoelectric shield probe handler. Automatic test software was developed on the Lahview plat- form, and the reverse breakdown voltage, dark current, punch-through voltage, and 10 times gain voltage of APD chips were tested automatically by using the test software. The probe handler make a NG mark on the failed chips based on the judgment result sent by the test instrument, which make it convenience to screen or eliminate the NG chip after wafer scribing. The auto-test system has the ability of high accuracy, high speed, convenient control interface and the test results are shown directly and totally. The parameter can be stored automatically and for easy SPC analyse.

关 键 词：雪崩光电二极管芯片 击穿电压 穿通电压 暗电流 测试系统 

分 类 号：TN364.2[电子电信—物理电子学]