压电驱动膜片的弯曲振动仿真  

Simulation of the Bending Vibration of Piezoelectric Actuator

作　　者：付赫林 李丽伟[1] 

机构地区：[1]上海电力学院能源与机械工程学院,上海200090

出　　处：《上海电力学院学报》2015年第6期565-567,580,共4页Journal of Shanghai University of Electric Power

摘　　要：基于压电本构方程,建立了压电弹性复合驱动膜的机电耦合模型,利用ANSYS软件对压电复合膜进行了静态及一阶模态分析,对比分析了空心与实心PZT复合膜片的驱动能力,分别讨论了复合膜厚度、压电膜与弹性膜直径比等结构参数对膜片振动挠度的影响,获得了压电层与弹性层最佳粘贴比.Based on the piezoelectric constitutive equation, the finite element model of coupled- field of PZT-Si3N4 film is established. Static analysis and first order modal simulation on the PZT- Si3N4 film are accomplished by using ANSYS software. The actuation capability of ring film is compared with that of circular film. The influences of structural parameters of actuation film such as thickness and diametrical ratio on actuatting deflection are analyzed separatedly. The optimum bonding ratio of PZT/Si3N4 is obtained.

关 键 词：微机电系统 压电驱动 弯曲振动 机电耦合 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置] TM384[自动化与计算机技术—控制科学与工程]