MEMS射频同轴线的仿真与工艺研究  

Simulation and Fabrication Research of MEMS RF Coaxial Transmission Line

作　　者：高荣惠[1] 赵龙[1] 崔建利[1] 张斌珍[1] 

机构地区：[1]中北大学电子测试技术重点实验室,山西太原030051

出　　处：《中北大学学报（自然科学版）》2015年第6期713-718,共6页Journal of North University of China(Natural Science Edition)

基　　金：国家自然科学基金资助项目(61401405);国家自然科学基金资助项目(51475438);山西省基础研究项目(2014011021-4);新世纪优秀人才支持计划资助项目(130951862)

摘　　要：以SU-8方形柱作为支撑衬底,初步设计中心频率为38GHz空气填充的微型矩形同轴线,通过HFSS电磁仿真软件对设计的结构进行模拟仿真与优化,并结合实际加工工艺和测试条件,最终确定中心同轴的横截面为200μm×200μm,外壁内表面的横截面为500μm×500μm,对支撑衬底尺寸进行最优化模拟仿真,确定SU-8矩形支撑衬底宽度为200μm.采用SU-8紫外光刻工艺并结合铜的电镀工艺进行微型同轴线结构的加工.利用微波探针测试台对其传输性能进行测试,测试结果显示该微型同轴线在中心频率处回波损耗S11在-30dB以下,插入损耗S12参数为-0.3dB.该工艺方法加工的同轴传输线具有带宽大、介质损耗小、辐射损耗小和抗干扰强等优点,可用于高性能射频和微波电路.另外,它的制作工艺可与其他射频和微波器件及集成电路工艺兼容,便于与射频和微波电路集成.Using SU-8as the supporting substrate,we designed a kind of micro rectangular coaxial line,which is filled with air and the center frequency was 38 GHz.HFSS was used to simulate and optimize to determine the size of the center coaxial was 200μm×200μm,the size of the cross-section of the inner surface of the outer wall was 500μm ×500μm.The substrate size was optimized by simulation and determined the SU-8rectangular support substrate width was 200μm.SU-8UV lithography process and copper plating process were combined to process the miniature coaxial line structure.The transmission performance was tested by the microwave probe test bed.The test results show that the return loss S11 in the center frequency is bellow-30 dB,the insertion loss S12is-0.3dB.The coaxial transmission line has the advantages of wide band width,low dielectric loss,low radiation loss and strong anti-interference et al.It is suitable for high-performance RF and micro-wave circuit.In addition,its manufacture craft can be compatible with RF and microwave devices and integrated circuit and integrated in RF and microwave circuit easily.

关 键 词：同轴传输线 光刻 电镀 SU-8 RF MEMS 

分 类 号：TH703[机械工程—仪器科学与技术]