工业原子力显微镜快速进针系统的设计  

Design of Industrial AFM Fast Tip Approach System

作　　者：王谦[1] 许广路[1] 薛虹[1] 殷伯华[1] 初明璋[1] 方光荣[1] 

机构地区：[1]中国科学院电工研究所北京市生物电磁学重点实验室,北京100190

出　　处：《现代科学仪器》2016年第3期29-33,共5页Modern Scientific Instruments

基　　金：国家面上基金支持项目：51375470;863计划项目：2012AA041204

摘　　要：摘要为了满足工业原子力显微镜高效检测的要求，提出了一种粗细相结合的自动进针方法。设计了快速的粗进针和慢速的精细进针二级进针控制系统硬件结构。针对工业半导体样品的特点，通过预标定方法保证粗进针动作快速到位。在精细进针阶段采用升降台步进动作和实时闭环检测，当检测到激光信号变化的值超过setpoint值时，完成进针操作。通过实验测试表明该方法有效减少了进针时间，提高了原子力显微镜的进针效率。In order to meet the industrial requirements for the eff^cient test of atomic force microscope, a fast tip approach method composed of rough approach and fine approach method is introduced. The hardware controlling system for the two level approaching including rough and fine section wasdesigned. According to the characteristics of the semiconductor industry sample, rough approach movement wasdone by the pre-calibration method. Stage step moving and close-loop real-time detection were acted during the fine tip approaching.When the laser signal value exceeds the value of setpoint, the approaching process is finished. Experiments showed that this method is effective to reduce the approaching time and to improve the efficiency.

关 键 词：原子力显微镜 进针控制 激光检测 PC-104控制器 

分 类 号：TH742[机械工程—光学工程]