声表面波滤波器理论研究进展  

Research progress on the theory of Surface Acoustic Wave filters

作　　者：陈颖慧[1] 张慧[1] 郑英彬[1] 

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621999

出　　处：《太赫兹科学与电子信息学报》2016年第3期467-473,共7页Journal of Terahertz Science and Electronic Information Technology

摘　　要：为使声表面波(SAW)滤波器技术向更高的频段发展,对SAW滤波器的基础理论进行了分析:展示了压电材料压电效应(逆压电效应)的产生机理,并通过例子对比说明压电材料的晶体结构属性。介绍了重要的物理量机电耦合系数以及SAW传播的物理机理;重点推导了SAW在压电介质中的传播性质,并同非压电介质的传播特性进行了对比。得出SAW在压电介质中是非色散波,存在3个方向的质点位移分量;压电薄膜中SAW是色散波,且压电薄膜使得声表面波速度发生变化。In order to extend the frequency of Surface Acoustic Wave（SAW） filters to a higher band, the principles of SAW filters are analyzed. At first, piezoelectricity and ob-piezoelectricity of piezoelectric film are presented. Then the performances of crystal structure of piezoelectric material are compared among different examples. The electro-mechanical coupling coefficients of important physical quantities are introduced as well as the physical mechanism of SAW transmission. Then the transmission properties of SAW in the piezoelectric material and piezoelectric film are studied in detail. And the transmission properties of SAW in piezoelectric medium and in ob-piezoelectric medium are contrasted. The results indicate that SAW is non-dispersive wave in the piezoelectric material with three directions of particle displacement vectors; while in the piezoelectric film, SAW is dispersive wave, and the piezoelectric film would influence the velocity of SAW.

关 键 词：声表面波 RAYLEIGH波 压电效应 压电薄膜 

分 类 号：TN713[电子电信—电路与系统]