面向三维组装的微纳平台设计与研究  

Design and Research of the Micro-nano System for 3D Micro-Assembly

作　　者：刘锦勇[1] 杨湛[1] 陈涛[1] 孙立宁[1] 

机构地区：[1]苏州大学江苏省先进机器人技术重点实验室&苏州纳米科技协同创新中心,江苏苏州215123

出　　处：《压电与声光》2016年第4期548-552,共5页Piezoelectrics & Acoustooptics

基　　金："八六三"计划基金资助项目(2015AA042601);国家自然科学基金资助项目(61433010)

摘　　要：针对20-40μm尺寸范围的微对象夹持需求,设计了一种压电驱动的微组装夹持器平台。使用有限元分析优化了夹持器的结构参数。该平台可以实现两指与三指操作模式的转换及对多种微对象的柔性操作。该文绘制了实验平台中压电陶瓷的驱动电压与执行末端位移的关系,单指的驱动范围0-41μm。压电陶瓷对该平台的输出位移分辨率达到了0.5μm/V。以直径20μm、40μm两种尺寸的硼硅酸盐玻璃球为操作对象,完成了夹持、释放及三维模型组装实验。A micro gripper system based on piezoelectric driver was designed for manipulating micro object with diame- ters of 20-40 μm. The structure parameters of the grippers were optimized using finite element analysis. The system could achieve the conversion between two fingers and three fingers, so the flexible operation of different micro objects was real- ized. In this paper, the relationship between the driving voltage of piezoelectric ceramics and the displacement of the end-ef- lectors was plotted, and the driving range of the single finger was 0-41 μm. In the experimental system, the output dis- placement resolution of the system was 0. 5μm/V. The clamping, releasing and three-dimensional model assembly experiments were completed using the micro spheres which diameter were fromφ20 μm to φ40 μm.

关 键 词：微夹持器 压电驱动 柔性铰链 三维组装 

分 类 号：TM282[一般工业技术—材料科学与工程] TP242.3[电气工程—电工理论与新技术]