有限元仿真技术在微机电系统课程教学中的应用与实践  

Application and Practice of Finite Element Simulation Technology in the Teaching of Microelectromechanical Systems Course

作　　者：王佩红[1] 石市委[1] 张苗[1] 廖艳林[1] 孟凡明[1] 

机构地区：[1]安徽大学物理与材料科学学院,安徽合肥230601

出　　处：《中国现代教育装备》2016年第15期1-3,共3页China Modern Educational Equipment

基　　金：安徽省自然科学基金项目(编号:1508085ME72);安徽大学本科教育质量提升计划项目(编号:XJJYXM14029);安徽大学校级本科教学工程教研项目(编号:JYXM201330,JYXM201328,JYXM201326)

摘　　要：在微机电系统课程中与工程力学相关的内容历来是教学的难点和重点。而ANSYS软件由于具有强大的前后处理及图形显示功能而成为国内外最广泛的计算机辅助分析软件之一。讨论了在微机电系统课程教学中使用ANSYS有限元仿真软件辅助教学的优势和必要性,并以具体教学案例讲解了使用方法。教学实践表明,在微机电系统课程教学中引入ANSYS有限元仿真软件辅助教学,不仅可以让学生对复杂模型和抽象概念有最为直观的认识,且有助于他们对问题的分析和理解,大大提高了教学效果。The content of engineering mechanics in the course of MEMS has always been the difficulty and the focus of teaching. ANSYS software is one of the most widely used computer aided analysis software because of its powerful processing and graphic display function. This paper first discusses the advantages and the necessity of using ANSYS software in the teaching of MEMS. Then how to use this method is given by a detailed example. The results show that this method not only can let the students have the most intuitive understanding of complex model and concept, but also can contribute to their analysis and understanding of the question. So this method can greatly improve the teaching effect.

关 键 词：ANSYS 微机电系统 圆形薄板 应力分布 位移分布 

分 类 号：G642[文化科学—高等教育学] TH-39[文化科学—教育学]