微气体传感器阵列及神经网络的应用  

Micro gas sensor array and application of artifical neural network

作　　者：邓俊泳[1] 冯勇建[1] 吴青海 

机构地区：[1]厦门大学机电工程系,福建厦门361005 [2]CaseWesternReserveUniversity

出　　处：《传感器技术》2002年第8期44-46,共3页Journal of Transducer Technology

摘　　要：简要分析由MEMS工艺制成的新型微气体传感器阵列的原理及其优点 ,在此基础上 ,应用人工神经网络对气体传感器阵列的输出进行模式分类、识别 ,实现对单一或混合气体的有选择性探测 ,识别率可高达 95 %。The principle and advantage of micro gas sensor array made by MEMS technology is analyzed summarily, and based on it, arithmetic of BP neural network is applied to classify the electronic nose's outputs and judge what the gases are.Not only single gas, but also mixed gases can be recognized selectively,with a high discernment 95%.

关 键 词：应用 MEMS工艺 微气体传感器阵列 人工神经网络 气体探测 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TP183[自动化与计算机技术—控制科学与工程]