基于改进六位置法的一种MEMS加速度计标定补偿方案  

A calibration and compensation scheme of MEMS accelerometer based on the improved six position method

作　　者：向高林[1] 路永乐[1] 刘宇[1] 龚大伟[1] 吕玲[1] 吴林志[1] XIANG Gaolin LU Yongle LIU Yu GONG Dawei LV Ling WU Linzhi(Chongqing Municipal Level Key Laboratory of Photoelectronic Information Sensing and Transmitting Technology Chongqing University of Posts and Telecommunications, Chongqing 400065, P.R. Chin)

机构地区：[1]重庆邮电大学光电信息感测与传输技术重庆市重点实验室,重庆400065

出　　处：《重庆邮电大学学报（自然科学版）》2017年第1期62-67,共6页Journal of Chongqing University of Posts and Telecommunications(Natural Science Edition)

基　　金：国家自然科学基金资助项目(51175535);国际联合研究中心科技平台与基地建设(cstc2014gjhz0038);重庆市研究生科研创新项目(CYS15163);重庆邮电大学博士启动基金(A2015-40);重庆邮电大学自然科学基金(A2015-49)~~

摘　　要：微机电系统(micro electronic mechanical system,MEMS)加速度计在测量过程中受安装误差、刻度因子及零偏影响,为提高MEMS加速度计的测量精度,在六位置法标定的基础上,提出一种改进的MEMS加速度计标定补偿方案。利用小波滤波对MEMS加速度计的原始测量值进行滤波,运用六位置法对6个位置的原始数据进行标定得到补偿模型。通过实验验证,MEMS加速度计测量精度由标定前的1.2 m/s2提高到0.01 m/s2,由MEMS加速度计解算的横滚角和俯仰角精度由标定前的1°提高到0.166 4°。MEMS accelerometer is influenced by installation error,scale factor and zero bias in the process of measuring.In order to improve the measurement accuracy of MEMS accelerometer,an improved calibration and compensation scheme of MEMS accelerometer based on six position method was proposed. Wavelet filtering was utilized to filter original measurements of MEMS accelerometer,and six position method was used to calibrate six position so as to get the compensated model. Verified by the experiments,the measurement accuracy of the MEMS accelerometer was raised to 0. 01 m / s2 from the1. 2m / s2,and the precision of roll angle and pitch angle calculated by MEMS accelerometer was raised to 0. 166 4° from the 1° before calibration.

关 键 词：MEMS加速度计 小波变换 六位置法 标定 

分 类 号：TN212[电子电信—物理电子学]