基于非均匀有理B样条的压电陶瓷非线性校正  

Non-linear correction of piezoelectric ceramics based on non-uniform rational B-spline

作　　者：常丽[1] 李庆斌[1] 黄格格 修国一[1] CHANG Li LI Qing-bin HUANG Ge-ge XIU Guo-yi(School of Information Science and Engineering, Shenyang University of Technology, Shenyang 110870, China)

机构地区：[1]沈阳工业大学信息科学与工程学院,沈阳110870

出　　处：《沈阳工业大学学报》2017年第2期183-187,共5页Journal of Shenyang University of Technology

基　　金：沈阳市科技局科研计划项目(F16-205-1-11;F13-316-1-57)

摘　　要：针对压电陶瓷的非线性迟滞特性限制两级进给式大行程精密定位系统定位精度提高的问题,利用非均匀有理B样条(NURBS)快速插补算法对迟滞特性进行补偿.在通过MATLAB软件实现NURBS插补算法的过程中,将NURBS插补算法与线性插值算法进行仿真和比较.结果表明,NURBS插补算法的误差明显小于线性插值算法的误差,验证了利用NURBS插补算法解决压电陶瓷非线性的正确性、可行性和实用性,解决了压电陶瓷非线性迟滞特性曲线模型建立的问题,且在精密工作台满足速度要求的前提下可实现更高的定位精度.Aiming at the problem that the non-linear hysteresis characteristics of piezoelectric ceramics limit the increase in the positioning accuracy of two-stage large travel precision positioning system,the hysteretic characteristics were compensated with a non-uniform rational B-spline（ NURBS） interpolation algorithm. In the process of realizing NURBS interpolation algorithm with MATLAB software,the NURBS interpolation algorithm and linear interpolation algorithm were used for the simulation and compared. The results showthat the error of NURBS interpolation algorithm is obviously smaller than that of linear interpolation algorithm,which verifies the correctness,feasibility and practicability of NURBS interpolation algorithm for solving the non-linear problem of piezoelectric ceramics. In addition,the NURBS interpolation algorithm solves the establishment problem of the model for the non-linear hysteresis characteristic curves of piezoelectric ceramics,and the higher positioning accuracy can be realized under the premise that the accurate working table meets the requirement in the speed.

关 键 词：压电陶瓷 精密定位系统 迟滞特性 NURBS插补 弓高误差 进给速度 误差补偿 定位精度 

分 类 号：TP273.5[自动化与计算机技术—检测技术与自动化装置]