开展磁控溅射镀膜探索研究性实验课程的尝试  

Primary attempt for carrying out exploratory experiment course on magnetron sputtering

作　　者：王奇[1] 王艳辉[1] 牟宗信[1] 赵纪军[1] 

机构地区：[1]大连理工大学物理学院三束材料改性教育部重点实验室,辽宁大连116023

出　　处：《物理实验》2017年第4期34-38,共5页Physics Experimentation

基　　金：国家自然科学基金青年基金项目(No.11405022);大连市高层次人才创新支持计划项目(No.2016RQ020);辽宁省高等教育教学改革研究项目;大连理工大学教改基金项目(No.ZHD201503);教育部教指委教改项目(No.01-201601-26)

摘　　要：磁控溅射镀膜实验涵盖了理工科大学生所认知的真空、高电压、材料制备等知识.结合大连理工大学国家级物理实验教学示范中心在探索研究性实验方面积累的教学经验与方法、等离子体物理国家重点学科的知识储备以及三束材料改性教育部重点实验室自主开发、手动操作的磁控溅射镀膜设备的优势,尝试将磁控溅射镀膜用于大学探索研究性实验教学.介绍了开展此实验所需的知识构成与设备模块,阐述了实验的设计思想与方法、开展实验的前期准备、课堂组织、注意事项,分析了课程实施的主要困难,并给出了解决方案.Knowledges, including vacuum, high voltage, materials preparation were all involved in the magnetron sputtering experiment. This course was carried out based on the teaching experience and methods of the National Physics Experiment Teaching Demonstration Center, the knowledge sys- tem of National Key Disciplinary of Plasma Physics of Dalian University of Technology, and the manual-operated magnetron sputtering equipment made by the Key Laboratory of Materials Modification by Laser, Ion and Electron Beams of Ministry of Education. In this paper, the knowledge composition and equipment module was recounted. The design idea, the preparation, the class organization and the preliminary results were described. Moreover, the main difficulties and the corresponding solutions were also given.

关 键 词：探索研究性实验 镀膜技术 磁控溅射 

分 类 号：G642.423[文化科学—高等教育学] O484.1[文化科学—教育学]