硅微机械陀螺仪温度补偿方法的研究现状  

Research Status of Temperature Compensation Methods for Silicon Micro-Electromechanical Gyroscopes

作　　者：刘楠[1,2] 苏言[1,2] 童鑫[1,2] 韩国威[1] 司朝伟[1] 宁瑾[1,3] 

机构地区：[1]中国科学院半导体研究所半导体集成技术工程研究中心,北京100083 [2]中国科学院大学材料科学与光电技术学院,北京100049 [3]中国科学院大学电子电气与通信工程学院,北京100049

出　　处：《微纳电子技术》2017年第6期395-400,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61274001;61234007;61504130)

摘　　要：综述了硅微机械陀螺仪温度补偿方法的研究现状。介绍了陀螺仪的基本原理,并分析了陀螺仪的温度特性。分别对温度控制、器件设计和算法补偿三种温度补偿方法进行了原理和结果分析,总结了各种方法的优势与不足。介绍了算法补偿中两种常用的温度误差模型构建方法,算法补偿既符合小体积、低成本的设计理念,又能有效提升陀螺仪的温度稳定性,但复杂的算法需要强大的内存支撑,系统的响应速度亦会受到影响,因此在算法的优化设计方面仍有巨大的研究潜力和空间。随着陀螺仪数字化进程的不断推进,温度误差模型构建的标准化方法以及优化的算法是未来进一步的发展方向。The research status of temperature compensation methods of silicon micro-electromechanical gyroscopes is reviewed. The basic principle of the gyroscope is introduced and the temperature characteristics of the gyroscope are analyzed. The principle and result analyses of three kinds of temperature compensation methods, namely temperature control, device design and arithmetic compensation are carried out, respectively. The advantages and disadvantages of the methods are summarized. Two kinds of the common temperature error model establishment methods in the arithmetic compensation are introduced. The arithmetic compensation has the de- sign concept of small volume and low cost and can effectively improve the temperature stability of gyroscopes, but the complex algorithm needs the large memory as the support and affects the response speed of the system. So there is a great research potential and space in the optimal design of the arithmetic. With the unceasing advancement of the digitization process of gyroscopes, the standardized methods of the temperature error model establishment and the optimized arithmetic are the further development directions in the future.

关 键 词：微机械系统(MEMS) 陀螺仪 零偏稳定性 温度补偿 软件算法补偿 

分 类 号：TH703[机械工程—仪器科学与技术] TN306[机械工程—精密仪器及机械]