陶瓷薄膜热电偶研究进展  

Research progress of ceramic thin film thermocouple

作　　者：张瑶[1] 丁桂甫[1] 王强 张丛春[1] 程萍[1] ZHANG Yao DING Gui-fu WANG Qiang ZHANG Cong-chun CHENG Ping(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China Aviation Industry Corp of China Commercial Aircraft Engine Co Ltd, Shanghai 201108, China)

机构地区：[1]上海交通大学电子信息与电气工程学院微纳电子系微纳米加工技术重点实验室,上海200240 [2]上海中航商用航空发动机制造有限责任公司,上海201108

出　　处：《传感器与微系统》2017年第9期1-4,12,共5页Transducer and Microsystem Technologies

摘　　要：实时监测飞机发动机各部件表面工作温度对发动机安全监控及性能验证等有重要意义,随着第三代飞机发动机—陶瓷发动机的开发,陶瓷薄膜热电偶已成为研究热点。综述了陶瓷薄膜热电偶材料种类、制备工艺、热电性能、高温稳定性及其测试技术的研究现状,指出了陶瓷热电偶当前需要研究的问题。Real-time monitoring surface temperature of aircraft engine parts has an important significance on safety monitoring and performance verification of engine. With the development of the third generation ceramic engine of aircraft,ceramic thin film thermocouple has become one of the hot topics. Materials,preparation process,thermoelectric properties,high temperature stability and testing technology of ceramic thin film thermocouple are reviewed. Problems that the ceramic thermocouple needs to be further studied in the future are presented.

关 键 词：陶瓷 薄膜热电偶 赛贝克系数 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]