离子辅助沉积对ZnS薄膜晶体结构及光学特性的影响  

Influence of Ion-Assisted Deposition on Crystal Structures and Optical Characteristics of ZnS Films

作　　者：冯毅东 秦杨[1] 于天燕[1] 

机构地区：[1]中国科学院上海技术物理研究所光学薄膜与材料研究室,上海200083 [2]中国科学院大学,北京100049

出　　处：《激光与光电子学进展》2017年第10期457-462,共6页Laser & Optoelectronics Progress

摘　　要：对不同离子束密度条件下辅助沉积的ZnS薄膜进行了物理及光学特性研究。研究结果表明,在离子束辅助沉积ZnS薄膜时会出现非均匀生长现象,且非均匀性和折射率会随着离子束密度的增加而增大,薄膜结晶程度也增加。薄膜的非均匀性增加了薄膜制备和设计的难度,尤其是对多层膜系的制备造成了很大的不确定性。研究结果为红外光学ZnS薄膜的研制提供了重要参考。The physical and optical properties of ion-assisted deposited ZnS films with different ion beam densities are investigated. The study results show that the phenomenon of inhomogeneous growth of ZnS films happens during the ion-assisted deposition. The inhomogeneity and refractive index of ZnS films increase with the increase of ion beam density, and the crystallization degree of films also increases. The inhomogeneity of films causes more difficulties for the preparation and design of films, especially an uncertainty for the preparation of a multilayer film system. The results provide an important reference for the development and production of infrared optical ZnS films.

关 键 词：薄膜 光学特性 离子束辅助沉积 硫化锌薄膜 非均匀性 折射率 

分 类 号：O484.4[理学—固体物理]