毫米级静电微扑翼驱动器的结构设计、工艺与测试  

Structure design,fabrication and testing of millimeter-scale electrostatic micro flapping-wing actuator

作　　者：杨艺 车云龙 

机构地区：[1]北京航空航天大学能源与动力工程学院,北京100191 [2]中国科学院电工研究所,北京100190

出　　处：《传感器与微系统》2018年第1期91-95,共5页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(11602010)

摘　　要：针对仿昆虫扑翼飞行器核心动力装置——微驱动器的结构特点和研究难点,设计了一种基于静电驱动原理的毫米(mm)级微扑翼驱动器,并针对各个部件研究了整套加工工艺与测试方法。运动优化与升力测试结果表明:微扑翼驱动器(翼展9 mm,重量3 mg)以91 Hz的频率实现了±40°的拍动和±25°的扭转运动,输出1.5 mg的升力,升重较以往静电微扑翼驱动器有大幅提升。研究成果为实现仿昆虫微型飞行器的自主飞行提供了新的方向,并奠定了理论与试验基础。Insect-inspired flapping-wing micro air vehicles（FMAV） are small in size and with high maneuver.Aiming at problems of structure characteristic and research difficulties of micro actuator,core power device of FMAV,a millimeter-scale electrostatic micro flapping-wing actuator based on electrostatic-actuated principle is designed. Moreover,a series of fabrication and testing methods are also developed. The result of testing shows that the 9 mm in wing span and 3 mg in weight stroke frequency of actuator is 91 Hz,flapping angle is ± 40°,rotating angle is ± 25°and lift force is 1. 5 mg. Lift-to-weight ratio is highly increased compared to previous results. These achievements lead to a new way to realize liftoff of FMAV and lay the foundation for theory and experiment.

关 键 词：微型飞行器 微机电系统 微驱动器 静电驱动 

分 类 号：V279[航空宇航科学与技术—飞行器设计]