基于压电驱动的多指微操作工具及实验研究  

Experimental Study on Piezoelectric Driven Micro-operating Actuator With Multi-fingered Structure

作　　者：孟凯[1] 陈涛[1] 杨湛[1] 刘会聪[1] 孙立宁[1] 

机构地区：[1]苏州大学江苏省先进机器人技术重点实验室&苏州纳米科技协同创新中心,江苏苏州215021

出　　处：《压电与声光》2018年第1期42-46,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(61673287;61433010);国家"八六三"计划基金资助项目(2015AA042601)

摘　　要：针对目前微纳操作对微纳操作工具的需求,设计并制造了一种结构简单、柔性模块化、高精度的压电驱动的多指微操作工具。通过实验验证了该多指微操作工具在单指、双指及三指工作模式下均能良好地完成相应的微纳操作,操作成功率在85%以上,夹持范围为10~800μm。通过改变执行末端,调整操作策略,可完成对不同尺寸、材质、结构的微球的拾取与释放。同时,使用多指微操作工具完成微球组装与超显微成像微球操作实验,证明了该操作工具具有重要的实际应用意义。According to the demands of micro-manipulation tools in the field of micro-nano manipulation,a modular multi-finger micro-operating tool with simple-structure,high-flexibility and high-precision was designed and fabricated.Each finger in the actuator was driven by piezoelectric ceramic actuator.The experiments on the multifinger micro-operating actuator under the single-finger,double-finger and triple-finger working modes were carried out to verify the abilities of manipulating various micro-targets with sizes ranging from 10 !m to 800 !m,and the success rate of more than 85% was achieved.The pickup and release of microspheres with different sizes,textures and structures can be completed by changing the end-effectors and adjusting the operating strategy.At the same time,the experiments of the microsphere self-adhesive assembly and the microsphere operation of ultra-microscopic were carried out by using multi-means micro-operation tool,which proved that the operation tool has important practical application significance.

关 键 词：微纳操作器 微机电系统 压电驱动器 柔性操作器 多指执行器 

分 类 号：TN384[电子电信—物理电子学] TP241.3[自动化与计算机技术—检测技术与自动化装置]