聚合物光波导45°反射面形成工艺研究  

Process Study on Polymer Optical Waveguide with 45° Reflection Plane

作　　者：赵飞[1] 陈雨 肖垣明[1] 卢立东 ZHAO Fei;CHEN Yu;XIAO Yuanming;LU Lidong(The 54th Research Institute of CETC,Shijiazhuang 050081,China;Hebei Noah Human Resource Development Co.Ltd.,Shijiazhuang 050035,China)

机构地区：[1]中国电子科技集团公司第五十四研究所,河北石家庄050081 [2]河北诺亚人力资源开发有限公司,河北石家庄050035

出　　处：《电子工艺技术》2018年第5期265-268,共4页Electronics Process Technology

基　　金：国防科工局预研基金项目(项目编号:HX165240001)

摘　　要：为了降低传输中的损耗,基于聚合物光波导实现光互连以满足系统应用。基于聚合物光波导传输理论,设计了含45°角的传输结构,梳理了制备流程。针对聚合物光波导45°反射面制备难题,通过前处理、包层光刻、芯层匀胶和芯层曝光等技术,获得线宽精度高和传输损耗低的光波导结构。通过对该结果测试表明,传输特性满足使用要求,可作为通信的重要手段。The polymer optical waveguides realizing interconnects could fulfill the demand of the communication system due to the lower transmission loss. Based on the transmission theory, the structure of polymer optical waveguide with 45°reflection plane is designed. The fabrication process is illustrated. Facing the problem during the fabrication, key techniques, including pretreatment, clad photolithography, core spinning and core exposure were solved to get polymer optical waveguide with high accuracy and low transmission loss. The tested result of the structure showed that the transmission property could fulfill the demand in the circuit, which could become the important approach in communication.

关 键 词：光波导 45°反射面 互连 前处理 光刻 传输损耗 

分 类 号：TN405[电子电信—微电子学与固体电子学]