100mm×100mm镀金反射光栅的制作与测量  

Fabrication and Measurement of Gold Reflective Grating with Size of 100 mm×100 mm

作　　者：卜凡涛 鲁云开 李民康 周常河[2,3] Bu Fantao1, Lu Yunkai2,3, Li Minkang2,3, Zhou Changhe2,3(1.School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China ; 2Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences, Shanghai 201800, China ; 3University of Chinese Academy of Sciences, Beijing 100049, China)

机构地区：[1]上海大学机电工程与自动化学院,上海200072 [2]中国科学院上海光学精密机械研究所信息光学与光电技术实验室,上海201800 [3]中国科学院大学,北京100049

出　　处：《中国激光》2018年第9期251-255,共5页Chinese Journal of Lasers

基　　金：上海市科委项目(15JC1403500;16DZ2290102);中国科学院前沿科学重点研究项目(QYZDJ-SSW-JSC014)

摘　　要：衍射光栅在各行各业有着广泛的应用,这就要求光栅必须具有良好的质量。在制作大尺寸光栅的各种方法中,激光直写技术具有明显优势,采用并行激光直写技术制作出了尺寸为100mm×100mm、线数为1780line/mm的正弦形光栅。首先对光栅进行理论分析,找出正弦形光栅在效率最高时的槽深;然后用激光直写技术制作光栅,最后在光栅表面镀上一层金膜。测量了光栅的衍射效率,并预估光栅的均匀性。结果表明:光栅的衍射效率约为90%,与理论值接近,而且分布很均匀,证明了并行激光直写技术制作高质量、大尺寸光栅的可行性。Diffraction grating is widely used in a variety of applications,which requires the grating to have good quality.Among various methods of making large-sized gratings,laser direct writing has obvious advantages.We use the parallel direct laser writing technology to produce a sinusoidal grating with size of 100 mm×100 mm and line number of 1780 line/mm.Firstly,the grating is analyzed theoretically to find a groove depth where the sinusoidal grating can reach its highest efficiency,then the grating is produced by laser direct writing and finally coated with a layer of gold.We introduce the diffraction efficiency measurement of the grating,and estimate the uniformity of the grating.The result shows that the diffraction efficiencies of the grating are around 90%,which is close to the theoretical calculation.Meanwhile,the efficiency distribution is uniform.Experimental results demonstrate that the developed parallel direct laser writing technology is feasible for producing high quality and large-sized gratings.

关 键 词：光栅 镀金光栅 测量 激光直写 衍射效率 

分 类 号：O436[机械工程—光学工程]