一种新型微机械陀螺的研究  

A Novel Silicon Micromachined Gyroscope

作　　者：熊斌[1] 黄小振[1] 王跃林[1] 王渭源[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050

出　　处：《高技术通讯》2002年第9期38-41,共4页Chinese High Technology Letters

基　　金：973规划 (G19990 3 3 10 1)

摘　　要：设计了一种检测模态和驱动模态具有相近品种因子的微机械陀螺。这种我们称之为栅型结构的陀螺由悬空弹簧将具有栅条的检测质量块与衬底相联。计算结果表明 ,这种器件在大气压条件下其驱动模态和检测模态的品质因子几乎同为 14 0。同时 ,计算结果还表明可以获得比较平坦的较大带宽。采用硅 玻璃键合和深反应离子刻蚀技术制作了这种器件。A novel gyroscope with the same Q factor of detected mode and driven mode was designed. The device structure which we called 'fence gyro' consists of a proof mass with bars linked up to substrate by suspend springs. The calculated result shows that the device has its Q factor of detected mode and driven mode in almost same order of 140 at atmospheric pressure. Also it shows that the larger bandwidth with flat band can be obtained. The devices are fabricated by silicon glass bonding wafers and deep reactive ion etching technology.

关 键 词：硅 微机械陀螺 微机械加工技术 深反应粒子刻蚀 玻璃 键合 

分 类 号：TH703[机械工程—仪器科学与技术]