InSb凝视红外焦平面组件研制和应用  

Development and applications of staring InSb infrared focal plane array assembly

作　　者：陈伯良[1] 孙维国[2] 梁平治[1] 郑志伟[2] 王正官[1] 朱晓池[2] 江美玲[1] 龚启兵[2] 丁瑞军[1] 黄水安[2] 

机构地区：[1]中国科学院上海技术物理所,上海200083 [2]中国空空导弹研究院,河南洛阳471009

出　　处：《红外与激光工程》2002年第5期419-423,共5页Infrared and Laser Engineering

基　　金：国家"八六三"计划资助项目 (863 30 8 1 6 0 1 4 )

摘　　要：研制成功了采用光伏InSb二极管列阵工艺、直接注入Si CMOS读出电路、微型玻璃杜瓦和微型节流制冷机的 6 4× 6 4元InSb红外焦平面组件。焦平面组件平均探测率约 1× 10 11cmHz1 2 W-1,平均量子效率约 72 %,响应率非均匀性约 18%,无效像元率约 0 .5 %。其性能参数满足红外成像制导的技术要求 ,已成功进行了凝视红外成像探测系统外场试验。InSb infrared focal plane array assembly, which composed of PV InSb array, Si CMOS readout, micro dewar and micro cooler, has been developed. The FPA assembly achieves a high performance with mean detectivity 1×10 11 cmHz 1/2 W -1 , quantum efficiency ～72%, non uniformity ～16%, and operability ～99.5%. The assembly specifications meet the requirement for missile guidance, and out door staring imaging detection has been demonstrated successfully.

关 键 词：INSB 焦平面列阵 铟锑合金 红外探测 信号读出 

分 类 号：TN215[电子电信—物理电子学]