电容式加速度计的温度特性分析与补偿设计  

Temperature Characteristics Analysis of Capacitance Accelerometer and Compensation Design

作　　者：肖珊珊 洪利[1,2] 姚振静[2] 韩智明[2] 李亚南[2] XIAO Shan-shan;HONG Li;YAO Zhen-jing;HAN Zhi-ming;LI Ya-nan(College of Computer and Communication Engineering,China University of Petroleum(East China),Qingdao 266580, China;Department of Disaster Prevention Apparatus,Institute of Disaster Prevention,Langfang 065201,China)

机构地区：[1]中国石油大学(华东)计算机与通信工程学院,山东青岛266580 [2]防灾科技学院防灾减灾装备开放实验室,河北廊坊065201

出　　处：《仪表技术与传感器》2018年第11期151-155,161,共6页Instrument Technique and Sensor

基　　金：中央高校基本科研业务费专项资金创新团队项目(ZY20160104);中国地震局教师科研基金项目(20140104)

摘　　要：电容式加速度传感器的弹性元件在不同温度条件下存在不同形变,导致传感器的零输入响应产生变化,影响了系统的线性特性。为此,采用ANSYS对加速度计的机械敏感模块进行了温度场的有限元分析,对极板位移与温度进行数学建模,进而提出了一种针对实时温度的非线性补偿控制方式。仿真验证结果表明:该方法能够有效降低温度对系统造成的影响,对于零漂的输出误差降低49.93%,并保证了系统在不同频段工作输出的稳定性,这也为电容式加速度传感器的性能改进提供了一种思路。The elastic element of the capacitance acceleration sensor has different deformation under different temperature conditions,which leads to the change of the zero input response of the sensor and affects the linear of the system.In this paper,ANSYS was used to analyze the temperature field finite element analysis of the mechanical sensitive module of the accelerometer.The displacement and temperature of the plate were modeled by mathematical method,and a nonlinear compensation control method was proposed for real-time temperature.The simulation results show that the method can effectively reduce the influence of temperature on the system,reduce the output error of the zero drift by 49.93%,and ensure the stability of the system output in different frequency bands.This also provides an idea for improving the performance of capacitive acceleration sensor.

关 键 词：电容式加速度计 温度特性 非线性补偿控制 

分 类 号：TH825[机械工程—仪器科学与技术]