高衍射效率凸面闪耀光栅的研制  

Fabrication of Convex Blazed Grating with High Diffraction Efficiency

作　　者：刘全 吴建宏[1,2,3] 郭培亮 陈新华[1,2,3] Liu Quan;Wu Jianhong;Guo Peiliang;Chen Xinhua(School of Optoelectronic Science and Engineering,Collaborative Innovation Center of Suzhou Nano Science and Technology,Soochow University,Suzhou,Jiangsu 215006,China;Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province,Soochow University,Suzhou,Jiangsu 215006,China;Key Lab of Modern Optical Technologies of Education Ministry of China,Soochow University,Suzhou,Jiangsu 215006,China)

机构地区：[1]苏州大学光电科学与工程学院苏州纳米科技协同创新中心,江苏苏州215006 [2]苏州大学江苏省先进光学制造技术重点实验室,江苏苏州215006 [3]苏州大学教育部现代光学技术重点实验室,江苏苏州215006

出　　处：《中国激光》2019年第3期304-308,共5页Chinese Journal of Lasers

基　　金：高分辨率对地观测系统重大专项(GFZX04061502);国家重点研发计划(2016YFB0500501);国家自然科学基金(60907017);上海市全固态激光器与应用技术重点实验室开放课题基金(2014ADL02);江苏高校优势学科建设工程(YX40000212)

摘　　要：基于严格耦合波分析,研究凸面闪耀光栅的衍射特性;采用全息光刻-离子束刻蚀法制作中心周期为2.45μm、曲率半径为51.64 mm、口径为17 mm的凸面闪耀光栅,闪耀角为6.4°,顶角为141°。结果表明,在整个可见-近红外波段,所制作光栅的1级衍射效率大于40%,在闪耀波长处1级衍射效率大于75%。The diffraction characteristics of the convex blazed grating are investigated by using rigorous coupled-wave analysis.The convex blazed grating with a central period of 2.45μm,a curvature radius of 51.64 mm,and an aperture of 17 mm is fabricated by using holographic lithography-scanning ion beam etching method.The blazed angle is 6.4°,and the vertex angle is 141°.The results show that the first-order diffraction efficiency of the proposed grating is greater than 40%in the whole visible and near-infrared band,and the first-order diffraction efficiency at blaze wavelength is greater than 75%.

关 键 词：光栅 凸面闪耀光栅 全息光刻 离子束刻蚀 衍射效率 

分 类 号：O438.1[机械工程—光学工程]