PET复合衬底上梯度介质薄膜厚度的椭偏表征  

Ellipsometric characterization of the thickness of gradient dielectric films on PET composite substrates

作　　者：郭春付 张传维 李伟奇[1] 李晓平 刘世元 GUO Chunfu;ZHANG Chuanwei;LI Weiqi;LI Xiaoping;LIU Shiyuan(Wuhan Eoptics Technology Co. Ltd., Wuhan 430223, China;State Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China;Wuhan National Laboratory for Opto-electronics, Huazhong University of Science and Technology, Wuhan 430074, China)

机构地区：[1]武汉颐光科技有限公司,武汉430223 [2]华中科技大学数字制造装备与技术国家重点实验室,武汉430074 [3]华中科技大学武汉光电国家研究中心,武汉430074

出　　处：《激光技术》2019年第4期585-590,共6页Laser Technology

基　　金：国家重点研发计划资助项目(2017YFF0204705)

摘　　要：为了监控3维玻璃上聚对苯二甲酸乙二醇酯(PET)复合衬底介质膜膜厚,采用将PET复合衬底等效为单层基底材料的建模分析方法,通过椭偏测量技术实现了复杂衬底上TiO 2梯度折射率材料薄膜厚度的检测.结果表明,采用该方法测量的PET复合衬底上TiO 2梯度折射率薄膜厚度为212.48nm,扫描电子显微镜的测量结果为211nm,结果非常准确.以TiO 2为例验证了等效衬底方法,该方法也同样适用于其它介质膜.等效衬底法可实现PET复合衬底上的TiO2薄膜厚度的高精度测量表征,对镀膜工艺过程监控具有重要意义.In order to monitor the film thickness of polyethylene terephthalate (PET) composite substrate on 3-D glass, modeling analysis method of PET composite substrates equivalent to single-layer substrates was adopted. The thickness measurement of titanium dioxide gradient refractive index material thin films on complex substrates was realized by ellipsometry. The result show that, the thickness of titanium dioxide gradient refractive index films on PET composite substrates is 212.48nm by this method. The results of scanning electron microscopy is 211nm. The result is very accurate. The equivalent substrate method is validated by taking titanium dioxide as an example. The method is also applicable to other dielectric films. This method can measure and characterize the thickness of titanium dioxide thin films on PET composite substrates with high accuracy, and is of great significance for monitoring the coating process.

关 键 词：测量与计量 聚对苯二甲酸乙二醇酯 复合衬底 介质膜 光谱椭偏 膜厚 

分 类 号：TN249[电子电信—物理电子学]