系统级模拟的MEMS器件宏模型  

Macromodels for System-level Simulation of MEMS Devices

作　　者：戎华[1] 黄庆安[1] 李伟华[1] 

机构地区：[1]东南大学微电子中心MEMS教育部重点实验室,南京210096

出　　处：《真空科学与技术》2002年第5期366-371,共6页Vacuum Science and Technology

摘　　要：MEMS器件的系统级模拟是实现器件优化的重要环节 ,常用的MEMS器件系统级模拟方法是基于宏模型 ,该宏模型要能与电路模拟软件相连接 ,再用电路模拟软件进行系统级模拟。因此 ,关键是如何建立能满足此种要求的宏模型。本文介绍了常用的等效电路宏模型和硬件描述语言宏模型的建立方法以及这两种宏模型的优缺点。As a key phase,the system level simulation of MEMS devices plays an important role in MEMS devices optimization.According to the conventional approach of the system level simulation,the macro models that can be connected seamlessly to electric networks simulating tools should be first created.Then the MEMS devices are analyzed with these simulating tools.So,creation of satisfactory macro models is of critical importance.Here,two widely used methods to create macro models--equivalent circuit macro models and HDL macro models--are discussed and their strengths and weaknesses are also discussed.

关 键 词：MEMS器件 系统级模拟 等效电路宏模型 硬件描述语言宏模型 微机电系统 

分 类 号：TH－39[机械工程] TN402[电子电信—微电子学与固体电子学]