钼酸铅晶体表面红外增透膜的研究  

Studies of Infrared Antireflection Coating on PbMoO_4 Single Crystal

作　　者：周团团[1] 胡焕林[1] 孙嵩泉 

机构地区：[1]合肥工业大学机械与汽车工程学院,合肥230009 [2]普乐光技术有限公司,合肥230088

出　　处：《真空科学与技术》2002年第5期392-394,共3页Vacuum Science and Technology

摘　　要：本文讨论了用于钼酸铅晶体表面的宽带红外增透膜的设计以及其在真空环境中的制备。膜系设计中 ,运用反射率图解法以获得满意的光学性能 ;与传统的热蒸发镀膜工艺相比 ,在真空沉积过程中采用了离子辅助沉积技术 ,从而大大提高了膜层的光学特性及膜层品质。试验表明所镀膜层性能优异 。Design and fabrication of the broadband infrared antireflection coating on PbMoO 4 single crystal in vacuum are discussed.It is shown that reflectance diagram method is a useful tool in thin film design to meet the required optical specifications.Ion assisted deposition(IAD) technology has been adopted in the vacuum deposition.The optical performance and coating quality have been improved drastically by using IAD technology in comparison with the traditional thermal vapor deposition.The experimental results suggest that the AR coating has excellent properties and will be widely used in the fiber optical communication industries.

关 键 词：钼酸铅晶体 红外增透膜 膜系设计 光纤通信 光学器件 真空沉积 离子辅助沉积 

分 类 号：TN25[电子电信—物理电子学] TB43[一般工业技术]